MAFU Robotics offers a comprehensive solution for material handling in special environments. Our high-vacuum-handling-systems prove themselves also in clean rooms. They are suitable for standard substrates as well as for substrates of non-standard sizes and weights. No matter whether you want to supply a CVD, PVD, dry etching process or metrology with material in vacuum, we offer you the suitable solution. Our vacuum chambers are equipped with high-performance-robots to ensure safe vacuum-transfer.
Vacuum-Cluster-Tool
Technical data
| Vacuum Level | 1x10e-7 mbar |
| Chamber Material | Aluminium / Stainless steel |
| Gate Valves | rectangular / round |
| Vacuum Technology | Pfeiffer / Leybold |
| Handling System | MAFU R-Drive robot |
We offer aligners for every substrate shape. They work in both atmosphere and vacuum. Our aligners are equipped with a precise sensor system to detect any features such as notch, flat, edges or corners
MAFU Robotics offers a comprehensive solution for material handling in special environments. Our high-vacuum-handling-systems prove themselves also in clean rooms.
