MAFU Robotics offers a comprehensive solution for material handling in special environments. Our high-vacuum-handling-systems prove themselves also in clean rooms. They are suitable for standard substrates as well as for substrates of non-standard sizes and weights. No matter whether you want to supply a CVD, PVD, dry etching process or metrology with material in vacuum, we offer you the suitable solution. Our vacuum chambers are equipped with high-performance-robots to ensure safe vacuum-transfer.
|Vacuum Level||1x10e-7 mbar|
|Chamber Material||Aluminium / Stainless steel|
|Gate Valves||rectangular / round|
|Vacuum Technology||Pfeiffer / Leybold|
|Handling System||MAFU R-Drive robot|