Vacuum-Cluster-Tool

MAFU Robotics offers a comprehensive solution for material handling in special environments. Our high-vacuum-handling-systems prove themselves also in clean rooms. They are suitable for standard substrates as well as for substrates of non-standard sizes and weights. No matter whether you want to supply a CVD, PVD, dry etching process or metrology with material in vacuum, we offer you the suitable solution. Our vacuum chambers are equiped with high-performance-robots to ensure safe vacuum-transfer.

Technical data

Vacuum Level 1x10e-7 mbar
Chamber Material Aluminium / Stainless steel
Gate Valves    VAT Ventile rectangular / round
MVacuum Technology Pfeiffer / Leybold
Handling System MAFU R-Drive Robot

 

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