M-Drive UHV-Tunnel

Modular UHV transport system

Whether you want to load a single UHV chamber or link several process chambers, the modular M-Drive transport system offers both the simplest and the best technical solution. The modular system has all the important standard modules to reach every point in the plane with remarkable accuracy. This does not require cables and complex mechanics inside the UHV area.

Download Datasheet M-Drive T 160 A


expansion functions

The E-Drive 400 linear axis was developed for connecting classic Load Locks or process chambers to our M-Drive. It can also be used well for general loading and unloading tasks

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