Sample positioning without feedthrough
The MAFU stage positions your samples in high vacuum (HV) and ultra high vacuum (UHV) and also in extreme high vacuum (XHV) in the XY plane, without the need for feedthroughs in your vacuum chamber. The movement is contactless, so that a very precise positioning is possible. Due to the absence of friction, the stage is able to move very short distances without breakaway forces. With this sample stage your metrology reaches even smaller dimensions. This vacuum-positioning-system is especially suitable for EUV-reticle metrology.
|Download Datasheet Vacuum stage M-Drive S 350 A|