Load lock

Vacuum load lock for individual substrates and cassettes enable flexible material infeed. The height of the substrate is only limited by the gate valve height. The load locks can be equipped with presence sensors, position sensors and material ID recognition.

Technical data

Vacuum level 1x10e-7 mbar
Leak rate 1x10e-8 mbar l/s
Mapping optional
Operating temperature 10-80 °C
Max. Bakeout temperature 120 °C
Slideout sensor optional
Substrate max. 250x250 mm
Vacuum pumps Turbo-, Cryo- or Prepumps on customer request