Without exaggeration, our M-Drive can be described as a revolution in vacuum handling. It transports wafers and other materials contact-free and without friction in vacuum chambers.

With our vacuum SCARA robot you can move even heavy substrates and unusual shapes safely in high vacuum into your process or metrology application.

Elevators overcome height differences of up to 200mm in the entire system or lift customer-specific cassettes. The linear stroke is sealed with a bellow and is therefore suitable for all vacuum ranges.

So far moving sensors inside a vacuum chamber have been a challenge. But with modern low power CPUs  and wireless data transmission the problem is solved.