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WE SOLVE YOUR CHALLENGES OF THE FUTURE...

Without exaggeration, our M-Drive can be described as a revolution in vacuum handling. It transports wafers and other materials contact-free and without friction in vacuum chambers.

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With our vacuum SCARA robot you can move even heavy substrates and unusual shapes safely in high vacuum into your process or metrology application.

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MAFU offers a wireless and vacuum suitable camera which can be positioned freely inside the vacuum chamber. It is a powerful tool for commissioning and debugging.

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Elevators overcome height differences of up to 200mm in the entire system or lift customer-specific cassettes. The linear stroke is sealed with a bellow and is therefore suitable for all vacuum ranges.

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So far moving sensors inside a vacuum chamber have been a challenge. But with modern low power CPUs  and wireless data transmission the problem is solved.

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We offer aligners for every substrate shape. They work in both atmosphere and vacuum. Our aligners are equipped with a precise sensor system to detect any features such as notch, flat, edges or corners

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