The E-Drive 400 linear axis was developed for connecting classic Load Locks or process chambers to our M-Drive. It can also be used well for general loading and unloading tasks. It closes the gap between manual loading or manual manipulators and complex automated multi-axis movements.
Due to the all-metal design and the bake-out capability It can be used at all vacuum pressures up to the XHV range.
|Download Datasheet Vakuum Elevator E-Drive 400 A|