Aligner

We offer aligners for every substrate shape. They work as vacuum-aligner as well as in atmosphere. Our aligners are based on industrial image processing sensors. This allows us to be flexible in detection and to achieve the best ratio of accuracy and speed according to your requirements. This also offers comprehensive diagnostic opportunities.

Technical data

Vacuum level 10e-7 mbar
Leak rate 10e-9 mBarl/s
Payload 1800g
Sensor Kamera
Transfer port 300 mm
Operating temperature 10-90 °C
Max. Bakeout temperature 120 °C
Substrate presence sensor Kamera
Centering accuracy 0,2 mm
Turning accuracy 0,1 mrad
Velocities Phi: 200 °/s
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