MAFU Robotics offers a comprehensive solution for material handling in special environments. Our handling systems prove themselves in clean rooms and in vacuum. They are suitable for standard substrates as well as for substrates of non-standard sizes and weights. No matter whether you want to supply a CVD, PVD, other processes or metrology with material in vacuum, we offer you the suitable solution.



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To align your substrate, we offer aligners for almost any substrate shape. They work in atmosphere as well as in vacuum.

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Elevators overcome height differences of up to 250mm in the entire system or lift customer-specific cassettes. The linear guide is sealed by means of a bellows and is therefore suitable for all vacuum ranges.

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Vacuum loadlocks for individual substrates and cassettes guarantee flexible material infeed 

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