Load Locks

Vacuum loadlocks for individual substrates and cassettes guarantee flexible material infeed. The height of the substrate is only limited by the gate valve. The loadlocks can be equipped with sensors for occupancy detection, position check of the substrates and material ID recognition.

Technical data

Vacuum level 5*10e-7 mBar
Leak rate 10e-8 mBarl/s
Payload 5000g
Stroke 300mm
Mapping optional
Operating temperature 10-90°C
Max. Bakeout temperature 120°C
Slideout sensor optional
Substrate Max. 250x250mm
Vacuum pumps Turbo, Kryo, oder nur Vorpumpen nach Kundenanforderungen
Velocities Z:100mm/s