To align your substrate, we offer aligners for almost any substrate shape. They work in atmosphere as well as in vacuum. Our aligners work with sensors based on industrial image processing. This allows us to be flexible in detection and to achieve the best ratio of accuracy to speed according to customer requirements. At the same time, this variant offers comprehensive diagnostics and enables the detection of almost all common markings on your substrate.

Technical data

Vacuum level 10e-7 mBar
Leak rate 10e-9 mBarl/s
Payload 1800g
Sensor Kamera
Transfer port 300mm
Operating temperature 10-90°C
Max. Bakeout temperature 120°C
Substrate presence sensor Kamera
Centering accuracy 0,2mm
Turning accuracy 0,1mrad
Velocities Phi:200°/s