To align your substrate, we offer aligners for almost any substrate shape. They work in atmosphere as well as in vacuum. Our aligners work with sensors based on industrial image processing. This allows us to be flexible in detection and to achieve the best ratio of accuracy to speed according to customer requirements. At the same time, this variant offers comprehensive diagnostics and enables the detection of almost all common markings on your substrate.
|Vacuum level||10e-7 mBar|
|Leak rate||10e-9 mBarl/s|
|Max. Bakeout temperature||120°C|
|Substrate presence sensor||Kamera|